,
(
1000
2000
3000
4000
5000
6000
7000
8000
9000
10000
)
1
...
2883
2884
2885
2886
2887
2888
2889
2890
2891
2892
2893
2894
2895
...
3650
,
:
- " . "
20% .
, , () ,
AlN AlF3
() , .
:
, ,
()
2008
1
...
2883
2884
2885
2886
2887
2888
2889
2890
2891
2892
2893
2894
2895
...
3650